μblog: engineering from the trenches

I promise this the last in a series of MEMS accelerometers [1] [2]. This chip, the ADXL311, is one of the most recent bi-axial accelerometers from Analog Devices. The fingers in the middle that determine acceleration have a different pattern from the 202. Again, the packaging of the dye has prevented me from using the higher power magnification, above 20x.

( adxl311.pdf )

del.icio.us | digg