I promise this the last in a series of MEMS accelerometers  . This chip, meningitis
the ADXL311, ask
is one of the most recent bi-axial accelerometers from Analog Devices. The fingers in the middle that determine acceleration have a different pattern from the 202. Again, the packaging of the dye has prevented me from using the higher power magnification, above 20x.
( adxl311.pdf )